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10-35-GHz frequency reconfigurable RF MEMS 5-bit DMTL phase shifter uses push-pull actuation based toggle mechanism
, S.K. Koul
Published in Institute of Electrical and Electronics Engineers Inc.
2014
Pages: 21 - 24
Abstract
This paper presents frequency reconfigurable RF MEMS phase shifter using distributed MEMS transmission line (DMTL) theory. The insertion phase of the circuit is controlled by torsional MEMS actuators. Bridge actuation mechanism followed by capacitance variation is the main source of the band tuning in this study. Two stages of actuation mechanisms (push and pull) are used to obtain differential phase shift over the band of interest. A constant resolution of 11.25° is obtained within a wide spectrum of 10-35 GHz. Measurement results show that a single bit phase shifter demonstrates return loss of better than 18 dB, worst case insertion loss of 1 dB and maximum phase error of 0.7° over the band of interest. Finally, push-pull tuning is verified on the complete 5-bit phase shifter with the same set of actuation voltages in different bands for 180° phase shifter. To the best of our knowledge, this is the first reported frequency reconfigurable wide band phase shifter with constant resolution. © 2014 IEEE.