In this paper, a novel Capacitance-to-Frequency Converter (CFC) with high linearity is presented. In the CFC, the capacitance to frequency conversion is obtained using a negative feedback mechanism. In this feedback, the frequency of the output controls the current delivered by a Switched-Capacitor (SC) network such that the difference error is automatically minimized. The proposed converter uses a dc reference voltage for the excitation and achieves high accuracy. The feedback mechanism ensures that the final output is insensitive to the linearity errors of the units employed to realize the forward path; namely a capacitance-to-voltage converter and a voltage-to-frequency converter. A prototype of the proposed CFC has been developed. The prototype was tested for sensor capacitance Cx varied from 5 pF to 25 pF. A prototype of the conventional CFC that operates in an open-loop mechanism was also developed and the linearity error was evaluated. It has been noted that the proposed closed-loop approach, reduces the worst-case nonlinearity error from 0.8% to 0.1%. This improvement is achieved without the use of any error compensating circuitries, and hence complexity level of the system remains same as a typical CFC. The prototype CFC has an update rate of 10 kS/s. The results obtained from the CFC confirmed its usefulness. © 2017 IEEE.