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Broadband, reliable and compact lateral MEMS SP4T and SP7T switching networks for 5G applications
, S.K. Koul
Published in Institute of Electrical and Electronics Engineers Inc.
2019
Volume: 86
   
Pages: 163 - 171
Abstract
The design, development and characterization of microelectromechanical systems (MEMS) based lateral single-pole-four-throw (SP4T) and single-pole-seven-throw (SP7T) switching networks are presented in this paper. Switches are fabricated using surface micromachining process on alumina substrate. SP4T and SP7T switches demonstrate measured average return loss of better than 22 dB and 12 dB, worst case average insertion loss of 0.3 dB and 5.89 dB at 3.5 GHz and 28 GHz, respectively. The average isolation is better than 22 dB up to 30 GHz. Switching networks are operational > 1 billion cycles even with 1 W of RF power. Maximum fabricated switch (SP7T) area is ~ 0.89 mm2 including bias lines and pads. © 2019 IEEE.
About the journal
JournalData powered by Typeset2019 IEEE MTT-S International Microwave and RF Conference, IMARC 2019
PublisherData powered by TypesetInstitute of Electrical and Electronics Engineers Inc.
Open AccessNo