The Chapter presents future scope in radio frequency (RF) micromachined devices in the THz frequency range. The Chapter is broadly divided into two parts, first part focusses on different metamaterial based micromachined devices at THz frequency range. Major emphasis is given on the micromachined frequency selective surfaces and absorbers. The second part focusses on the micromachined waveguide-based switches, phase shifters and conductor backed coplanar waveguide to rectangular waveguide transition in the THz frequency range. Different state-of-the-art designs are discussed in this Chapter with recent references. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.