In this Chapter new techniques that enable broader bandwidths and operation at higher frequencies in conventional micromachined switches are presented. Focus is on the use of defective ground structure (DGS) and use of secondary switches to improve MEMS switch performance. Detailed performance analysis of metamaterial inspired MEMS switches are then discussed for application in millimetre wave frequency bands up to about 170 GHz. In addition, new design techniques to improve reliability by taking advantage of Casimir force to reduce stiction is reported. Layout and results of metamaterial inspired capacitive as well as resistive contact micro machined MEMS switches for application in modern electronic circuits and 5G/6G communication systems are also presented. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.