In this Chapter an overview on different classes of passive components that can be realized using radio frequency microelectromechanical systems (RF MEMS) technology is provided. Focus is oriented toward the performance description of RF passive components in micromachining technology, compared to their standard semiconductor counterparts. It includes, micromachined coplanar waveguide transmission line, varactors, inductors, power divider, coupler, and impedance matching tuners. Conductor Backed Coplanar Waveguide (CBCPW) lines on Si micromachined substrate are in use for more than a decade and it is given prime emphasis in this Chapter. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.