This Chapter presents behavioral analysis of ohmic contact micromachined switches. In this Chapter, electrostatically actuated micromachined switch configurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of micromachined switch topologies that can control the propagating modes of multimodal uniplanar structures (based on a coplanar waveguide (CPW)) are be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, confirming the expected performances. Mostly cantilever types of switches are chosen in this study and analysis procedure is described with lumped model representation. Different types of ohmic-contact switches are discussed in this Chapter with extensive set of measurement stages. It includes switch profile analysis where surface profile and initial deformation are measured using Optical Profilometer, mechanical resonance frequency measurement and characterization using Laser Doppler Vibrometer (LDV), characterization of switch actuation and release voltages using LCR meter under a DC probe station, switching and release time measurements utilizing a proposed set up, linearity and temperature stability analysis and characterizations within a laboratory environments, S-parameter measurements using RF probe station with a Vector Network Analyzer (VNA) followed by the power handling capability and its analysis within a laboratory environments. Switch performances are discussed against each measurement stages. Functionalities of ohmic contact broadband switches are discussed with behavioral analysis. Comparison between simulated versus all measured responses are discussed up to a reasonable extent. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.