Header menu link for other important links
X
Micromachined Tunable Filters Using MEMS Switches
S Koul K,
Published in Springer Science and Business Media Deutschland GmbH
2022
Volume: 859
   
Pages: 195 - 223
Abstract
This Chapter presents radio frequency (RF) micro-electromechanical system (MEMS) based compact, high power and reliable tunable bandpass filter for millimetre wave RF front end. The design is fabricated on 635 µm alumina substrate using surface micromachining process. All functional building blocks of the filter are fabricated and tested independently to ensure the optimum filter performances. Total area of the filter is only 2.3 mm2 including bias lines and pads. The proposed filter can be tuned to any frequency between 27–29 GHz, and it demonstrates insertion loss of 1.92 dB and matching of 23.4 dB at 28 GHz with fractional bandwidth of 6.7%. Filter also gives bandwidth tuning of 4.4 GHz with acceptable loss. A complete set of MEMS based tunable bandpass filter design guidelines are given for the readers. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
About the journal
JournalMicromachined Circuits and Devices
PublisherSpringer Science and Business Media Deutschland GmbH
ISSN18761100
Open AccessNo