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Modulation of Porous Silicon Morphology: Correlation with Dopant Concentration and Electrolyte CompositionPublished in Institute of Electrical and Electronics Engineers Inc.
2022
While there have been extensive reports in literature regarding the synthesis of porous silicon layers using electrochemical anodization for their use in different applications, systematic studies regarding the influence of the substrate dopant concentration and the electrolyte composition on the pore dimensions have not not been extensively investigated. In this work, we have systematically looked at the influence of dopant concentration and different electrolyte compositions on the pore dimensions of the porous silicon layer, along with varying input current density and reaction time. © 2022 IEEE.
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About the journal
| Journal | 2022 IEEE Nanotechnology Materials and Devices Conference, NMDC 2022 |
|---|---|
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
Authors (1)
Revathy Padmanabhan- High-performance stacked TiO2-ZrO2 and Si-doped ZrO2 metal-insulator-metal capacitors
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