Radio frequency micro electromechanical system (RF MEMS) based switches are widely used in microwave and millimeter wave communication systems for their low loss, excellent linearity, low power consumption and compact size compared to other contemporary solid state devices [1]. Surface micromachining technology is typically used to develop different types of single pole multi-throw (SPMT) switches like SPST, SPDT and SP4T. MEMS series and shunt switches are extensively used in SPMT RF switches for multiband selectors, filter banks, reconfigurable antennas and phase shifter applications in transmit/receive modules. © 2014, Springer India.