In micro machining processes, achieving the required accuracy and surface quality in the first attempt is of utmost importance. Because, it is challenging to perform a secondary operation in a microscaled structure due to re-positioning inaccuracies. In the micro grinding process, geometrically deviated structures are common due to the low depth of cuts compared to the size of abrasive grits. Moreover, abrasive grits random distribution on the tool surface is also a factor. In most of the cases, the number of grits participating in the grinding process is countable, unlike macro grinding process. Hence, the position of every grit on the micro tool surface is important. In the micro grinding process, geometrically deviated structures are common due to the low depth of cuts compared to the size of abrasive grits. In this case, the depth of cut values will be less than the size of the abrasive grits. In that case, the abrasive grits located at the tool bottom surface highly influence the quality of the component produced. In the present work, a simulation study has been performed for micro grinding process to understand the influence of tool topography on the micro channel geometrical deviations, especially when the depth of cut is less than the size of the grits. Simulation results showed the importance of the number of grits, their protrusion heights and radial positions on the tool bottom surface at small depths of cuts to minimize the geometrical deviations. © Copyright 2018 ASME.